• Triton 40:Plasma Treatment System

  • 游戏大厅捕鱼Triton 40 is a full featured plasma system designed for R&D and polite line. This compact bench-top system  could generate uniform plasma over the whole process area.

Triton40 Specifications
EnclosureWxDxH635W x 860D x 690H mm
ChamberWxDxH340W x 456D x 280H mm
Max Number of Electrods8
Electrode Gap57mm
ElectrodesPowered Working Area226W x 320D mm
Ground Working Area1300W x 320D mm
PF SystemRF Power&Frequency300W/13.56MHz
Gas ControlNumber of MFCs2 standard/ up to 4
Vacuum PumpPump25m³/h  Oil pump
Facility ReauirementsPower Supply220V, 10A, 50Hz, Single-Phase, 13AWG, 3-Wire
Process Gas Fitting Size&Type0.25 in.OD
Process Gas Purity

CF4 = 99.97%; O2 = 99.996%;  N2 = 99.99%;

Ar = 99.999%;  Consult the sonovorr for the rest of the gas

Process Gas Pressure15~20 psig
Purge Gas Fitting Size&Type0.25 in.OD
Purge Gas PurityN2=99.99%
Purge Gas Pressure15-60 psig
Pneumatic Valves Fitting Size&Type0.25 in.OD
Pneumatic Gas SpecificationsCDA, 60~90 psig
Exhaust Size & TypeKF25
Working Temperature5~40℃
Working Humidity40~60%